Invention Grant
- Patent Title: Method for detecting flare degree of lens of exposure machine
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Application No.: US17492786Application Date: 2021-10-04
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Publication No.: US11604417B2Publication Date: 2023-03-14
- Inventor: Haisheng Song , Xiaolong Wang , Shijun Zhou
- Applicant: Shanghai Huali Microelectronics Corporation
- Applicant Address: CN Shanghai
- Assignee: Shanghai Huali Microelectronics Corporation
- Current Assignee: Shanghai Huali Microelectronics Corporation
- Current Assignee Address: CN Shanghai
- Agency: Banner & Witcoff, Ltd.
- Priority: CN202011125663.8 20201020
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/44

Abstract:
Provided in the disclosure is a photomask for detecting flare degree of lens of exposure machine. The photomask includes a central exposure area and a peripheral area, exposure light of the exposure machine passing through the lens and then penetrating the central exposure area to expose photoresist on a wafer, wherein the entire central exposure area is provided with a shading layer to prevent the exposure light from penetrating; and the peripheral area is provided with a plurality of light-transmitting stripes, and stray light formed after the exposure light passes through the lens penetrates the plurality of light-transmitting stripes to expose the photoresist. Further provided in the disclosure is a method for detecting flare degree of lens of exposure machine by using the photomask. According to the disclosure, a lens flare problem of an exposure machine can be found and solved in time.
Public/Granted literature
- US20220121108A1 Photomask and Method for Detecting Flare Degree of Lens of Exposure Machine Table Public/Granted day:2022-04-21
Information query
IPC分类: