Invention Grant
- Patent Title: Pulsing control match network
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Application No.: US17152625Application Date: 2021-01-19
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Publication No.: US11605527B2Publication Date: 2023-03-14
- Inventor: Alexandre De Chambrier , Stephen E. Savas
- Applicant: COMET TECHNOLOGIES USA, INC.
- Applicant Address: US CA San Jose
- Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee: COMET TECHNOLOGIES USA, INC.
- Current Assignee Address: US CA San Jose
- Agency: Nolte Lackenbach Siegel
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A method of controlling a radio frequency processing system, the method including determining an end time of a radio frequency pulse; stopping a load applied to the radio frequency processing system based on the end time of the radio frequency pulse; adjusting an additional load having a predetermined impedance applied to the radio frequency processing system in response to the determined end time; determining a start point of a second radio frequency pulse; and stopping the additional load before the second radio frequency pulse occurs.
Public/Granted literature
- US20210225613A1 PULSING CONTROL MATCH NETWORK AND GENERATOR Public/Granted day:2021-07-22
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