Invention Grant
- Patent Title: Multi-threshold voltage non-planar complementary metal-oxide-semiconductor devices
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Application No.: US17481497Application Date: 2021-09-22
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Publication No.: US11605634B2Publication Date: 2023-03-14
- Inventor: Ruqiang Bao , Koji Watanabe
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randy Emilio Tejeda
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L29/06

Abstract:
A device is provided. The device includes an interfacial layer on a semiconductor device channel. The device further includes a dipole layer on the interfacial layer, and a gate dielectric layer on the dipole layer. The device further includes a first work function layer associated with a first field effect transistor device; and a second work function layer associated with a second field effect transistor device, such that the first field effect transistor device and second field effect transistor device each have a different threshold voltage than a first field effect transistor device and second field effect transistor device without a dipole layer.
Public/Granted literature
- US20220005807A1 MULTI-THRESHOLD VOLTAGE NON-PLANAR COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR DEVICES Public/Granted day:2022-01-06
Information query
IPC分类: