Invention Grant
- Patent Title: Steep-switch field effect transistor with integrated bi-stable resistive system
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Application No.: US17128786Application Date: 2020-12-21
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Publication No.: US11605672B2Publication Date: 2023-03-14
- Inventor: Julien Frougier , Nicolas Loubet , Ruilong Xie , Daniel Chanemougame , Ali Razavieh , Kangguo Cheng
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Garg Law Firm, PLLC
- Agent Rakesh Garg; Joseph Petrokaitis
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; H01L29/78 ; H01L21/3213

Abstract:
Fabricating a steep-switch transistor includes receiving a semiconductor structure including a substrate, a fin disposed on the substrate, a source/drain disposed on the substrate adjacent to the fin, a gate disposed upon the fin, a cap disposed on the gate, and a trench extending to the source/drain. A trench contact is formed in the trench in contact with the source/drain. A recess is formed in a portion of the trench contact below a top surface of the cap using a recess patterning process. A bi-stable resistive system (BRS) material is deposited in the recess in contact with the portion of the trench contact. A source/drain contact is formed upon the BRS material, a portion of the trench contact, the BRS material, and a portion of the source/drain contact forming a reversible switch.
Public/Granted literature
- US20210111225A1 STEEP-SWITCH FIELD EFFECT TRANSISTOR WITH INTEGRATED BI-STABLE RESISTIVE SYSTEM Public/Granted day:2021-04-15
Information query
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