Invention Grant
- Patent Title: Semiconductor lasers and processes for the planarization of semiconductor lasers
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Application No.: US16678535Application Date: 2019-11-08
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Publication No.: US11605933B2Publication Date: 2023-03-14
- Inventor: Ali Badar Alamin Dow , Jason Daniel Bowker , Malcolm R. Green
- Applicant: MACOM Technology Solutions Holdings, Inc.
- Applicant Address: US MA Lowell
- Assignee: MACOM Technology Solutions Holdings, Inc.
- Current Assignee: MACOM Technology Solutions Holdings, Inc.
- Current Assignee Address: US MA Lowell
- Agency: Perilla Knox & Hildebrandt LLP
- Agent Jason M. Perilla
- Main IPC: H01S5/10
- IPC: H01S5/10 ; H01S5/223 ; H01L21/67 ; H01S5/028 ; H01L21/3105 ; H01L21/68 ; H01S5/22 ; H01S5/024 ; H01S5/042 ; C23C14/30 ; H01S5/00 ; H01S5/02 ; H01S5/343
Abstract:
A laser structure may include a substrate, an active region arranged on the substrate, and a waveguide arranged on the active region. The waveguide may include a first surface and a second surface that join to form a first angle relative to the active region. A material may be deposited on the first surface and the second surface of the waveguide.
Public/Granted literature
- US20200076164A1 SEMICONDUCTOR LASERS AND PROCESSES FOR THE PLANARIZATION OF SEMICONDUCTOR LASERS Public/Granted day:2020-03-05
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