Invention Grant
- Patent Title: Semiconductor chip bonding apparatus including head having thermally conductive materials
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Application No.: US16807466Application Date: 2020-03-03
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Publication No.: US11607741B2Publication Date: 2023-03-21
- Inventor: Sebin Choi , Sunghyup Kim , Sukwon Lee , Jonggu Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2019-0110881 20190906
- Main IPC: B23K1/00
- IPC: B23K1/00 ; H01L23/00 ; B23K101/40

Abstract:
Provided a semiconductor chip bonding apparatus including a body, a heater disposed on a lower surface of the body, a collet disposed on a lower surface of the heater, and a head disposed on a lower surface of the collet, the head has a rectangular plate shape, a lower surface and side surfaces of the head are exposed, an upper surface of the head is in contact with the lower surface of the collet, an area of the upper surface of the head is smaller than an area of the lower surface of the collet, the head includes a central section including a recess, and an outer surface constituting a part of the side surfaces of the head, and a peripheral section connected to the recess and disposed on each corners of the head, and a thermal conductivity of the peripheral section is different from that of the central section.
Public/Granted literature
- US20210069811A1 SEMICONDUCTOR CHIP BONDING APPARATUS INCLUDING HEAD HAVING THERMALLY CONDUCTIVE MATERIALS Public/Granted day:2021-03-11
Information query
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