Invention Grant
- Patent Title: Adhesive for semiconductor device, and high productivity method for manufacturing said device
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Application No.: US16680547Application Date: 2019-11-12
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Publication No.: US11608455B2Publication Date: 2023-03-21
- Inventor: Kazutaka Honda , Koichi Chabana , Keishi Ono , Akira Nagai
- Applicant: HITACHI CHEMICAL COMPANY, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee: HITACHI CHEMICAL COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Fitch, Even, Tabin & Flannery, LLP
- Priority: JPJP2015-212990 20151029,JPJP2016-044788 20160308,JPJP2016-115355 20160609
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065 ; C09J11/06 ; C09J201/00 ; H01L25/07 ; H01L25/18 ; C09J163/00 ; C09J11/04

Abstract:
Disclosed is a method for manufacturing a semiconductor device which includes: a semiconductor chip; a substrate and/or another semiconductor chip; and an adhesive layer interposed therebetween. This method comprises the steps of: heating and pressuring a laminate having: the semiconductor chip; the substrate; the another semiconductor chip or a semiconductor wafer; and the adhesive layer by interposing the laminate with pressing members for temporary press-bonding to thereby temporarily press-bond the substrate and the another semiconductor chip or the semiconductor wafer to the semiconductor chip; and heating and pressuring the laminate by interposing the laminate with pressing members for main press-bonding, which are separately prepared from the pressing members for temporary press-bonding, to thereby electrically connect a connection portion of the semiconductor chip and a connection portion of the substrate or the another semiconductor chip.
Public/Granted literature
- US20200095481A1 ADHESIVE FOR SEMICONDUCTOR, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SAID DEVICE Public/Granted day:2020-03-26
Information query
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