Invention Grant
- Patent Title: System and method for analysis of measurement data acquired from multiple workpieces
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Application No.: US16820527Application Date: 2020-03-16
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Publication No.: US11609089B2Publication Date: 2023-03-21
- Inventor: Oliver Rüger , Daniel Görsch
- Applicant: Carl Zeiss Industrielle Messtechnik GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Miller Johnson
- Priority: EP19162769 20190314
- Main IPC: G01B21/04
- IPC: G01B21/04 ; G01B21/20

Abstract:
A method for evaluating measurement data from a measurement of a plurality of workpieces includes obtaining a set of measurement data. Each workpiece has an associated set of measurement data. The set of measurement data corresponds to measurement points of the workpieces. The set of measurement data has, for each measurement point of the workpieces, at least one measured coordinate and/or, for each measured coordinate, a divergence from a comparison coordinate. The method includes determining a measure of the correlation of the measured coordinates and/or of the divergences is determined for a plurality of the sets of measurement data, in each case in relation to a pair of measurement points that consists of two measurement points of the workpieces.
Public/Granted literature
- US20200292309A1 System and Method for Analysis of Measurement Data Acquired from Multiple Workpieces Public/Granted day:2020-09-17
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