System and method for analysis of measurement data acquired from multiple workpieces
Abstract:
A method for evaluating measurement data from a measurement of a plurality of workpieces includes obtaining a set of measurement data. Each workpiece has an associated set of measurement data. The set of measurement data corresponds to measurement points of the workpieces. The set of measurement data has, for each measurement point of the workpieces, at least one measured coordinate and/or, for each measured coordinate, a divergence from a comparison coordinate. The method includes determining a measure of the correlation of the measured coordinates and/or of the divergences is determined for a plurality of the sets of measurement data, in each case in relation to a pair of measurement points that consists of two measurement points of the workpieces.
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