Invention Grant
- Patent Title: Frequency-modulating sensor array
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Application No.: US17712095Application Date: 2022-04-02
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Publication No.: US11609136B2Publication Date: 2023-03-21
- Inventor: Paul M. Hagelin , Charles I. Grosjean , Lev Goncharov
- Applicant: SiTime Corporation
- Applicant Address: US CA Santa Clara
- Assignee: SiTime Corporation
- Current Assignee: SiTime Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01L5/16
- IPC: G01L5/16 ; G01L1/14 ; G01L1/20 ; G01L9/00
Abstract:
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Public/Granted literature
- US20220291065A1 FREQUENCY-MODULATING SENSOR ARRAY Public/Granted day:2022-09-15
Information query
