Invention Grant
- Patent Title: Wafer inspection system and wafer inspection equipment thereof
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Application No.: US17337954Application Date: 2021-06-03
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Publication No.: US11609261B2Publication Date: 2023-03-21
- Inventor: Wei-Chih Chen , Ben-Mou Yu , Yi-Yen Lin
- Applicant: CHROMA ATE INC.
- Applicant Address: TW Taoyuan
- Assignee: CHROMA ATE INC.
- Current Assignee: CHROMA ATE INC.
- Current Assignee Address: TW Taoyuan
- Agency: WPAT, PC
- Priority: TW109126250 20200803
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01N21/95 ; G01R31/28

Abstract:
A wafer inspection system and a wafer inspection equipment thereof are provided. The wafer inspection system includes a susceptor device, probe card, and bridge module. The susceptor device includes a susceptor unit for placing a wafer under test. The probe card includes a probing portion and conducting portion. The conducting portion is disposed at the periphery of the probing portion and has a contact surface. The bridge module includes transmission units extended upward, positioned adjacent to a wafer placement area, and coupled to the susceptor unit. When the probing portion comes into contact with a testing point of the wafer, the contact surface of the conducting portion gets coupled to the transmission units to transmit a test signal to the probe card via the transmission units and conducting portion and thus form a test loop. Thus, the test loop path can be shortened and the accuracy of signal transmission and inspection can be enhanced.
Public/Granted literature
- US20220034956A1 WAFER INSPECTION SYSTEM AND WAFER INSPECTION EQUIPMENT THEREOF Public/Granted day:2022-02-03
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