Invention Grant
- Patent Title: Silicon-containing coating agent for pattern reversal
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Application No.: US16082241Application Date: 2017-02-10
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Publication No.: US11609499B2Publication Date: 2023-03-21
- Inventor: Shuhei Shigaki , Hiroaki Yaguchi , Makoto Nakajima
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2016-033394 20160224
- International Application: PCT/JP2017/004921 WO 20170210
- International Announcement: WO2017/145809 WO 20170831
- Main IPC: G03F7/075
- IPC: G03F7/075 ; G03F7/30 ; G03F7/36 ; C08G77/06 ; C09D183/04 ; G03F7/11 ; C08G77/16

Abstract:
A composition for flattening uneven substrates. The composition for flattening uneven substrates, which is applied on an organic pattern, includes a solvent and a polysiloxane including a hydrolysis condensate of a hydrolyzable silane, wherein the polysiloxane includes silanol groups in a proportion of 20 mol % or less with respect to Si atoms, and the weight-average molecular weight of the polysiloxane is 1,000-50,000.
Public/Granted literature
- US20190339618A1 SILICON-CONTAINING COATING AGENT FOR PATTERN REVERSAL Public/Granted day:2019-11-07
Information query
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