Invention Grant
- Patent Title: Self-sensing and self-actuating valve for modulating process coolant flow
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Application No.: US17173146Application Date: 2021-02-10
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Publication No.: US11609584B2Publication Date: 2023-03-21
- Inventor: Shivaram Chandrashekar , Kumaresan Nagarajan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G05D7/01
- IPC: G05D7/01 ; F28F27/02 ; F16F1/02 ; F03G7/06

Abstract:
A valve includes a first inline compartment to attach to a first return line exiting a processing chamber and a second inline compartment to attach to a second return line entering a coolant source. A flow compartment is attached between the first inline compartment and the second inline compartment and through which a coolant is to return to the coolant source. A first inlet orifice and a second inlet orifice positioned between the first inline compartment and the flow compartment. A plunger has a tip to variably open and close the second inlet orifice. A shape memory alloy (SMA) spring is positioned on the plunger and attached to the tip, the SMA spring to variably increase or decrease a flow rate of the coolant through the second inlet orifice according to a temperature of the coolant.
Public/Granted literature
- US20220253077A1 SELF-SENSING AND SELF-ACTUATING VALVE FOR MODULATING PROCESS COOLANT FLOW Public/Granted day:2022-08-11
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