- Patent Title: Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample
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Application No.: US17507342Application Date: 2021-10-21
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Publication No.: US11610755B2Publication Date: 2023-03-21
- Inventor: Robert Trauner , Bernhard Schüler , Bernhard G. Mueller , Nikolai Knaub , Kulpreet Singh Virdi
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01J37/22
- IPC: H01J37/22 ; G06T7/00 ; H01J37/21 ; H01L21/67
Abstract:
A method of automatically focusing a charged particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.
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