Invention Grant
- Patent Title: Vacuum arc source
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Application No.: US17049083Application Date: 2019-03-13
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Publication No.: US11610760B2Publication Date: 2023-03-21
- Inventor: Peter Polcik , Szilard Kolozsvari , Igor Zhirkov , Johanna Rosen
- Applicant: Plansee Composite Materials GmbH
- Applicant Address: DE Lechbruck am See
- Assignee: Plansee Composite Materials GmbH
- Current Assignee: Plansee Composite Materials GmbH
- Current Assignee Address: DE Lechbruck am See
- Agent Laurence A. Greenberg; Werner H. Stemer; Ralph E. Locher
- Priority: EP18168526 20180420
- International Application: PCT/EP2019/056291 WO 20190313
- International Announcement: WO2019/201517 WO 20191024
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/06 ; C23C14/32

Abstract:
A vacuum arc source for arc evaporation of boride includes: a cathode made of at least 90 at-% of boride, in particular made of more than 98 at-% of boride; an anode, which is preferably in the shape of a disk; a body made of a material which is less preferred by arc discharge compared to the cathode, the body surrounding the cathode in such a way that during operation of the vacuum arc source, movement of an arc on an arc surface of the cathode is limited by the body. At least 90 at-% of the material of the anode is of the same chemical composition as the cathode.
Public/Granted literature
- US20210257186A1 VACUUM ARC SOURCE Public/Granted day:2021-08-19
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