Invention Grant
- Patent Title: Condenser system for high pressure processing system
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Application No.: US16830420Application Date: 2020-03-26
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Publication No.: US11610773B2Publication Date: 2023-03-21
- Inventor: Jean Delmas
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: B08B3/02
- IPC: B08B3/02 ; H01L21/02 ; H01L21/67 ; F16T1/38 ; F22B29/08

Abstract:
Embodiments described herein relate to a high pressure processing system with a condenser and methods for utilizing the same. The processing system includes a process chamber, a boiler, a condenser, and one or more heat exchangers. The boiler generates a fluid, such as a vapor or supercritical fluid, and delivers the fluid to the process chamber where a substrate is processed. After processing the substrate, the system is depressurized and the fluid is delivered to the condenser where the fluid is condensed.
Public/Granted literature
- US20200227254A1 CONDENSER SYSTEM FOR HIGH PRESSURE PROCESSING SYSTEM Public/Granted day:2020-07-16
Information query
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