Invention Grant
- Patent Title: Membrane diffuser for a substrate container
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Application No.: US16552005Application Date: 2019-08-27
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Publication No.: US11610795B2Publication Date: 2023-03-21
- Inventor: Mark V. Smith , Nicholas Thelen , Matthew A. Fuller , Michael C. Zabka , Sung In Moon , John P. Puglia
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/67
Abstract:
Purge diffusers for use in systems for transporting substrates include: i) a purge diffuser core having an internal purge gas channel, one or more diffuser ports and an outer surface; ii) filter media secured to the outer surface of the purge diffuser core; and iii) a purge port connector for mounting the purge diffuser to a purge port of a substrate container for transporting substrates. The purge diffuser core may be a unitary article, may be formed by injection molding, and may include diverters internal to the internal purge gas channel.
Public/Granted literature
- US20200075374A1 MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER Public/Granted day:2020-03-05
Information query
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