Invention Grant
- Patent Title: Semiconductor chip suitable for 2.5D and 3D packaging integration and methods of forming the same
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Application No.: US17498821Application Date: 2021-10-12
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Publication No.: US11610814B2Publication Date: 2023-03-21
- Inventor: Deep C. Dumka
- Applicant: Qorvo US, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/3065 ; H01L21/304 ; H01L23/48 ; H01L23/66 ; H01L25/065 ; H01L29/06

Abstract:
The present disclosure relates to a semiconductor chip that includes a substrate, a metal layer, and a number of component portions. Herein, the substrate has a substrate base and a number of protrusions protruding from a bottom surface of the substrate base. The substrate base and the protrusions are formed of a same material. Each of the protrusions has a same height. At least one via hole extends vertically through one protrusion and the substrate base. The metal layer selectively covers exposed surfaces at a backside of the substrate and fully covers inner surfaces of the at least one via hole. The component portions reside over a top surface of the substrate base, such that a certain one of the component portions is electrically coupled to a portion of the metal layer at the top of the at least one via hole.
Public/Granted literature
- US20220028741A1 SEMICONDUCTOR CHIP SUITABLE FOR 2.5D AND 3D PACKAGING INTEGRATION AND METHODS OF FORMING THE SAME Public/Granted day:2022-01-27
Information query
IPC分类: