Invention Grant
- Patent Title: Semiconductor device with air gaps between adjacent conductive lines
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Application No.: US17101281Application Date: 2020-11-23
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Publication No.: US11610840B2Publication Date: 2023-03-21
- Inventor: Chin-Ling Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/525
- IPC: H01L23/525

Abstract:
The present disclosure provides a semiconductor device with air gaps between adjacent conductive lines and a method for forming the semiconductor device. The semiconductor device with air gaps between adjacent conductive lines and a method for forming the semiconductor device. The semiconductor device includes a first dielectric layer disposed over a semiconductor substrate, and a first electrode disposed over the first dielectric layer. The semiconductor device also includes a fuse link disposed over the first electrode, and a second electrode disposed over the fuse link. The semiconductor device further includes a third electrode disposed adjacent to the first electrode, and a second dielectric layer separating the first electrode from the first dielectric layer and the third electrode. The first electrode, the fuse link, and the second electrode form a fuse structure, and the first electrode, the third electrode, and a portion of the second dielectric layer between the first electrode and the third electrode form an anti-fuse structure.
Public/Granted literature
- US20220165662A1 SEMICONDUCTOR DEVICE WITH AIR GAPS BETWEEN ADJACENT CONDUCTIVE LINES Public/Granted day:2022-05-26
Information query
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