Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17016909Application Date: 2020-09-10
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Publication No.: US11610910B2Publication Date: 2023-03-21
- Inventor: Daisuke Hagishima , Fumitaka Arai , Keiji Hosotani , Masaki Kondo
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-050773 20200323
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11519 ; H01L27/11565 ; G11C16/04

Abstract:
According to one embodiment, a semiconductor memory device includes first and second semiconductor layers and a first conductive layer. The first and second semiconductor layers extend in a first direction. The second semiconductor layer is stacked above the first semiconductor layer in a second direction intersecting the first direction. The first conductive layer intersects the first and second semiconductor layers and extends in the second direction. The first conductive layer includes first and second portions intersecting the first and second semiconductor layers respectively. A width of the first portion in the first direction is smaller than a width of the second portion in the first direction. A thickness of the first semiconductor layer in the second direction is larger than a thickness of the second semiconductor layer in the second direction.
Public/Granted literature
- US20210296337A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-09-23
Information query
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