Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17184094Application Date: 2021-02-24
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Publication No.: US11610912B2Publication Date: 2023-03-21
- Inventor: Hidenobu Nagashima
- Applicant: KIOXIA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-052449 20180320
- Main IPC: H01L27/11575
- IPC: H01L27/11575 ; H01L27/11573 ; H01L21/762 ; H01L27/11565 ; H01L23/535 ; H01L21/768 ; H01L27/11582 ; H01L21/311

Abstract:
According to one embodiment, a semiconductor memory device includes a stacked body, memory pillars, first and second insulation layers and an isolation region. The stacked body above a substrate includes conductive layers isolated from each other and stacked along a first direction crossing the substrate surface. The memory pillars extend through the stacked body along the first direction. The first insulation layer is provided above the memory pillars. The isolation region is provided higher than upper surfaces of the memory pillars in the stacked body along the first direction, and isolates the stacked body in a second direction crossing the first direction. The second insulation layer is provided on the first insulation layer and a side wall of the isolation region.
Public/Granted literature
- US20210183881A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-06-17
Information query
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