Invention Grant
- Patent Title: Image sensing device with structural reinforcement layer
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Application No.: US17228329Application Date: 2021-04-12
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Publication No.: US11610926B2Publication Date: 2023-03-21
- Inventor: Yun Hui Yang , Tae Gyu Park , Dong Bin Park
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Perkins Coie LLP
- Priority: KR10-2020-0085538 20200710
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensing device that includes a reinforced structure is disclosed. The image sensing device includes a semiconductor substrate structured to include a pixel region including a plurality of unit pixels and a peripheral region located outside the pixel region, a plurality of microlenses disposed over the semiconductor substrate in the pixel region, a structural reinforcement layer disposed over the semiconductor substrate in the peripheral region, and a lens capping layer structured to cover the microlenses and at least of the structural reinforcement layer. The structural reinforcement layer includes a plurality of fingers each finger vertically structured to have a rounded upper end and laterally extend to have a predetermined length toward the pixel region. The fingers are consecutively arranged and connected to each other in a lateral direction, and side surfaces of fingers are in contact with side surfaces of immediately adjacent fingers.
Public/Granted literature
- US20220013564A1 IMAGE SENSING DEVICE Public/Granted day:2022-01-13
Information query
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