Invention Grant
- Patent Title: Back-side illuminated image sensor
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Application No.: US17327364Application Date: 2021-05-21
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Publication No.: US11610933B2Publication Date: 2023-03-21
- Inventor: Frederic Lalanne , Laurent Gay , Pascal Fonteneau , Yann Henrion , Francois Guyader
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Seed Intellectual Property Law Group LLP
- Priority: FR1851203 20180213
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L21/768 ; H01L21/02 ; H01L21/306

Abstract:
Image sensors and methods of manufacturing image sensors are provided herein. In an embodiment, a method of manufacturing an image sensor includes forming a structure having a front side and a back side. The structure includes a semiconductor layer extending between the front side and the back side of the structure, and a capacitive insulation wall extending through the semiconductor layer between the front side and the back side of the structure. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductive or semiconductor material. The method further includes selectively etching, from the back side of the structure, portions of the semiconductor layer and the region of conductive or semiconductor material, while retaining adjacent portions of the first and second insulating walls.
Public/Granted literature
- US20210288102A1 BACK-SIDE ILLUMINATED IMAGE SENSOR Public/Granted day:2021-09-16
Information query
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