Invention Grant
- Patent Title: Localized strain fields in epitaxial layer over cREO
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Application No.: US17229992Application Date: 2021-04-14
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Publication No.: US11611001B2Publication Date: 2023-03-21
- Inventor: Andrew Clark , Rodney Pelzel , Richard Hammond
- Applicant: IQE plc
- Applicant Address: GB Cardiff
- Assignee: IQE plc
- Current Assignee: IQE plc
- Current Assignee Address: GB Cardiff
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/84 ; H01L21/02 ; H01L21/62

Abstract:
A layered structure (100) for transmission of an acoustic wave, the layered structure (100) comprising: a substrate layer (102); and a second layer (104) over the substrate layer (102), wherein the second layer (104) comprises a plurality of discrete portions (105) adjacent to each other, each discrete portion (105) of the plurality of discrete portions (105) comprising a first subregion (104A) and a second subregion (104B). Also an epitaxial layer (108), grown over the second layer (104), for transmission of the acoustic wave in a major plane of the epitaxial layer (108), wherein a periodicity (λ) of a wavelength of the acoustic wave to be transmitted through the epitaxial layer (108) is approximately equal to a sum of a width (dA) of the first subregion (104A) and a width (dB) of the second subregion (104B).
Public/Granted literature
- US20210320214A1 LOCALIZED STRAIN FIELDS IN EPITAXIAL LAYER OVER cREO Public/Granted day:2021-10-14
Information query
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