Invention Grant
- Patent Title: Photodiode and/or pin diode structures
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Application No.: US16935854Application Date: 2020-07-22
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Publication No.: US11611002B2Publication Date: 2023-03-21
- Inventor: Mark D. Levy , Edward W. Kiewra , Siva P. Adusumilli , John J. Ellis-Monaghan
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L29/868
- IPC: H01L29/868 ; H01L31/107 ; H01L29/66 ; H01L29/06

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to photodiodes and/or PIN diode structures and methods of manufacture. The structure includes: a spiral fin structure comprising semiconductor substrate material and dielectric material; a photosensitive semiconductor material over sidewalls and a top surface of the spiral fin structure, the photosensitive semiconductor material positioned to capture laterally emitted incident light; a doped semiconductor material above the photosensitive semiconductor material; and contacts electrically contacting the semiconductor substrate material and the doped semiconductor material from a top surface thereof.
Public/Granted literature
- US20220029032A1 PHOTODIODE AND/OR PIN DIODE STRUCTURES Public/Granted day:2022-01-27
Information query
IPC分类: