Invention Grant
- Patent Title: Backside illuminated photo-sensitive device with gradated buffer layer
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Application No.: US16993824Application Date: 2020-08-14
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Publication No.: US11611005B2Publication Date: 2023-03-21
- Inventor: Yu-Hung Cheng , Chia-Shiung Tsai , Cheng-Ta Wu , Xiaomeng Chen , Yen-Chang Chu , Yeur-Luen Tu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L31/103
- IPC: H01L31/103 ; H01L31/0352 ; H01L31/0232 ; H01L31/18 ; H01L31/028 ; H01L31/109 ; H01L27/146 ; H01L31/105

Abstract:
A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
Public/Granted literature
- US20200373445A1 Backside Illuminated Photo-Sensitive Device with Gradated Buffer Layer Public/Granted day:2020-11-26
Information query
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