Invention Grant
- Patent Title: Piezoelectric element and liquid droplet ejection head
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Application No.: US17213322Application Date: 2021-03-26
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Publication No.: US11611034B2Publication Date: 2023-03-21
- Inventor: Yasuhiro Itayama
- Applicant: Seiko Epson Corporation
- Applicant Address: JP Toyko
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Toyko
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JPJP2020-057303 20200327
- Main IPC: B41J2/14
- IPC: B41J2/14 ; H01L41/083 ; H01L41/09 ; H01L41/187

Abstract:
There is provided a piezoelectric element including: a substrate; a first electrode formed at a first substrate surface of the substrate in a first direction; a first piezoelectric layer that is formed at the first electrode and that includes a flat surface portion along the first substrate surface and an inclined surface portion inclined with respect to the flat surface portion; a second piezoelectric layer that is formed at the inclined surface portion 170a and whose thickness is smaller than a thickness of the flat surface portion of the first piezoelectric layer; and a second electrode formed at at least the flat surface portion.
Public/Granted literature
- US20210305483A1 Piezoelectric Element And Liquid Droplet Ejection Head Public/Granted day:2021-09-30
Information query
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