Invention Grant
- Patent Title: Fin bulk acoustic resonator technology for UHF and SHF signal processing
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Application No.: US16637496Application Date: 2018-08-17
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Publication No.: US11611328B2Publication Date: 2023-03-21
- Inventor: Roozbeh Tabrizian
- Applicant: University of Florida Research Foundation, Incorporated
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee Address: US FL Gainesville
- Agency: Alston & Bird LLP
- International Application: PCT/US2018/000295 WO 20180817
- International Announcement: WO2019/036010 WO 20190221
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H01L27/20 ; H03H3/02 ; H03H9/10 ; H03H9/13 ; H03H9/15

Abstract:
A Fin Bulk Acoustic Resonator (FinBAR) includes a fin integrally fabricated on a substrate of a glass or a semiconductor, an inner electrode deposited on the fin, a piezoelectric layer disposed on the inner electrode, an outer electrode deposited on the piezoelectric layer, a first electrode and a second electrode formed on the top surface of the substrate and connected to the inner and outer electrodes respectfully. The fin is characterized with a larger height than its width. A FinBAR array including a number of the FinBARs with different fin widths sequentially located on one chip is capable of continuously filtering frequencies in UHF and SHF bands.
Public/Granted literature
- US20200259479A1 FIN BULK ACOUSTIC RESONATOR TECHNOLOGY FOR UHF AND SHF SIGNAL PROCESSING Public/Granted day:2020-08-13
Information query
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