Invention Grant
- Patent Title: Micro-electro-mechanical resonators
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Application No.: US16737748Application Date: 2020-01-08
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Publication No.: US11611330B2Publication Date: 2023-03-21
- Inventor: Roozbeh Tabrizian , Mayur Ghatge
- Applicant: University of Florida Research Foundation, Inc.
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Inc.
- Current Assignee: University of Florida Research Foundation, Inc.
- Current Assignee Address: US FL Gainesville
- Agency: Alston & Bird LLP
- Main IPC: H01L41/083
- IPC: H01L41/083 ; H01L41/18 ; H03H9/17 ; H03H9/54 ; H03H9/56

Abstract:
A tunable non-reciprocal frequency limiter with an asymmetric micro-electro-mechanical resonator has two independent transducer ports. One port has a film stack including a 10 nm hafnium zirconium oxide (HZO) and another port has a film stack including a 120 nm aluminum nitride (AlN) film. These film stacks are deposited on top of 70 nm single crystal silicon substrate applying CMOS compatible fabrication techniques. The asymmetric transducer architecture with dissimilar electromechanical coupling coefficients force the resonator into mechanical nonlinearity on actuation with transducer having larger coupling. A proof-of-concept electrically-coupled channel filter is demonstrated with two such asymmetric resonators at ˜253 MHz with individual Qres of ˜870 and a non-reciprocal transmission ratio (NTR) ˜16 dB and BW3 dB of 0.25%.
Public/Granted literature
- US20200228095A1 MICRO-ELECTRO-MECHANICAL RESONATORS Public/Granted day:2020-07-16
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