Invention Grant
- Patent Title: Polishing pad
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Application No.: US16541708Application Date: 2019-08-15
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Publication No.: US11612979B2Publication Date: 2023-03-28
- Inventor: Katsuyoshi Kojima , Arisa Kuroda
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2018-155656 20180822
- Main IPC: B24B37/26
- IPC: B24B37/26

Abstract:
A polishing pad has a disk-shaped substrate and a polishing layer of which an upper surface side is adhered to the substrate. The polishing layer includes a plurality of through-holes which penetrate the polishing pad vertically and which are supplied with a polishing liquid, and a plurality of grooves which are formed on the lower surface side of the polishing pad and which are connected to the through-holes. The plurality of through-holes are formed such as to surround the center of the polishing layer, and the plurality of grooves are formed radially from the plurality of through-holes toward the outer periphery of the polishing layer.
Public/Granted literature
- US20200061773A1 POLISHING PAD Public/Granted day:2020-02-27
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