Invention Grant
- Patent Title: Grinding apparatus
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Application No.: US17149119Application Date: 2021-01-14
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Publication No.: US11612980B2Publication Date: 2023-03-28
- Inventor: Yujiro Sudo
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer, Burns & Crain, Ltd.
- Priority: JPJP2020-016990 20200204
- Main IPC: B24B41/06
- IPC: B24B41/06 ; B24B41/02 ; B24B7/22

Abstract:
A grinding apparatus includes a chuck table for holding a workpiece thereon, a table base supporting the chuck table, a grinding unit for grinding the workpiece held on the chuck table with a grinding wheel mounted on an end of a spindle, a load detecting unit for detecting a load applied from the grinding unit to the table base, a tilt adjustment unit supporting the table base thereon, for adjusting a tilt of the table base, a storage for storing a correlative relation between loads applied to the table base and changes in the tilt of the table base, and a controller for controlling the tilt adjustment unit based on the load detected by the load detecting unit and the correlative relation, to adjust the tilt of the table base so that a change in the tilt of the table base that corresponds to the detected load is cancelled out.
Public/Granted literature
- US20210237225A1 GRINDING APPARATUS Public/Granted day:2021-08-05
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