Invention Grant
- Patent Title: Non-destructive bond line thickness measurement of thermal interface material on silicon packages
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Application No.: US16662158Application Date: 2019-10-24
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Publication No.: US11614324B2Publication Date: 2023-03-28
- Inventor: Hongqing Zhang , Jay A. Bunt , David J. Lewison , Joyce Molinelli Acocella , Yu Luo
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Tihon Poltavets
- Main IPC: H01L21/02
- IPC: H01L21/02 ; G01B15/02 ; H01L21/50 ; H01L21/66

Abstract:
Aspects of the invention include a non-destructive bond line thickness measurement of thermal interface material on silicon packages. A non-limiting example computer-implemented method includes receiving a chip mounted on a laminate and depositing a high-density material on the chip. The computer-implemented method deposits a thermal interface material on the chip and lids the chip, and the laminate with a lid. The computer-implemented method X-rays the lid, the chip, and the laminate to produce an X-ray and measures, using a processor, from the X-ray a bond line thickness of the TIM as a distance from a bottom of the lid to a top surface of the high-density material.
Public/Granted literature
- US20210123729A1 NON-DESTRUCTIVE BOND LINE THICKNESS MEASUREMENT OF THERMAL INTERFACE MATERIAL ON SILICON PACKAGES Public/Granted day:2021-04-29
Information query
IPC分类: