Invention Grant
- Patent Title: High performance micro-electro-mechanical systems accelerometer
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Application No.: US16608326Application Date: 2018-04-24
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Publication No.: US11614463B2Publication Date: 2023-03-28
- Inventor: Xudong Zou , Ashwin Arunkuman Seshia
- Applicant: Cambridge Enterprise Limited
- Applicant Address: GB Cambridgeshire
- Assignee: Cambridge Enterprise Limited
- Current Assignee: Cambridge Enterprise Limited
- Current Assignee Address: GB Cambridgeshire
- Agency: Nexsen Pruet, LLC
- Agent Todd A. Serbin
- Priority: GB1706732 20170427
- International Application: PCT/GB2018/051068 WO 20180424
- International Announcement: WO2018/197857 WO 20181101
- Main IPC: G01P15/097
- IPC: G01P15/097 ; G01P15/08 ; G01P15/13

Abstract:
There is provided a resonant sensor comprising: a substrate; a proof mass suspended from the substrate by one or more flexures to allow the proof mass to move relative to the frame along a sensitive axis; a first and a second resonant element connected between the frame and the proof mass; wherein the proof mass is positioned between the first and the second resonant element along the sensitive axis, and wherein the first and the second resonant elements have a substantially identical structure to one another; and drive and sensing circuitry comprising: a first electrode assembly coupled to first drive circuitry configured to drive the first resonant element in a first mode; a second electrode assembly coupled to second drive circuitry configured to drive the second resonant element in a second mode, different to the first mode; and a sensing circuit configured to determine a measure of acceleration.
Public/Granted literature
- US20200166537A1 HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER Public/Granted day:2020-05-28
Information query
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