Invention Grant
- Patent Title: Inspection device and method for operating inspection device
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Application No.: US16975506Application Date: 2019-02-13
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Publication No.: US11614477B2Publication Date: 2023-03-28
- Inventor: Yasuhiro Osuga , Koju Yamamoto
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JPJP2018-032363 20180226
- International Application: PCT/JP2019/005134 WO 20190213
- International Announcement: WO2019/163608 WO 20190829
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01N25/68

Abstract:
An inspection device according to an embodiment can conduct high temperature inspection and low temperature inspection on an object to be inspected. The inspection device includes an inspection chamber in which inspection is conducted on the object; a dry air supply section that is connected to the inspection chamber via a first valve and that is configured to supply dry air into the inspection chamber; a dew point meter that is connected to the inspection chamber via a second valve and that is configured to measure a dew point in the inspection chamber; and a bypass pipe connecting the dry air supply section and the dew point meter via a third valve.
Public/Granted literature
- US20210132135A1 INSPECTION DEVICE AND METHOD FOR OPERATING INSPECTION DEVICE Public/Granted day:2021-05-06
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