Invention Grant
- Patent Title: Test apparatus for testing semiconductor packages and automatic test equipment having the same
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Application No.: US17152474Application Date: 2021-01-19
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Publication No.: US11614483B2Publication Date: 2023-03-28
- Inventor: Dahm Yu , Hyunmin Kwon , Jaehyun Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2020-0046771 20200417
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/28 ; G01R1/04 ; G01R1/067 ; G01R1/073

Abstract:
A test apparatus and an automatic test equipment having the same are disclosed. The test apparatus includes a test head having a test area, a socket board combined to the test area of the test, the socket board including a socket body and an active device attached on a first surface of the socket body, the active device configured to operate a semiconductor package, and a heat exchanger arranged on an upper portion of the test head, the heat exchanger being in contact with the socket board.
Public/Granted literature
- US20210325450A1 TEST APPARATUS FOR TESTING SEMICONDUCTOR PACKAGES AND AUTOMATIC TEST EQUIPMENT HAVING THE SAME Public/Granted day:2021-10-21
Information query