Invention Grant
- Patent Title: High-speed wavelength-scale spatial light modulators with two- dimensional tunable microcavity arrays
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Application No.: US16876477Application Date: 2020-05-18
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Publication No.: US11614643B2Publication Date: 2023-03-28
- Inventor: Cheng Peng , Christopher Louis Panuski , Ryan Hamerly , Dirk Robert Englund
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Smith Baluch LLP
- Main IPC: G02F1/017
- IPC: G02F1/017 ; B82Y20/00 ; G02F1/21 ; G01J3/26 ; F21V8/00 ; G02F1/03

Abstract:
A reflective spatial light modulator (SLM) made of an electro-optic material in a one-sided Fabry-Perot resonator can provide phase and/or amplitude modulation with fine spatial resolution at speeds over a Gigahertz. The light is confined laterally within the electro-optic material/resonator layer stack with microlenses, index perturbations, or by patterning the layer stack into a two-dimensional (2D) array of vertically oriented micropillars. Alternatively, a photonic crystal guided mode resonator can vertically and laterally confine the resonant mode. In phase-only modulation mode, each SLM pixel can produce a π phase shift under a bias voltage below 10 V, while maintaining nearly constant reflection amplitude. This high-speed SLM can be used in a wide range of new applications, from fully tunable metasurfaces to optical computing accelerators, high-speed interconnects, true 2D phased array beam steering, beam forming, or quantum computing with cold atom arrays.
Public/Granted literature
- US20210018767A1 High-Speed Wavelength-Scale Spatial Light Modulators with Two-Dimensional Tunable Microcavity Arrays Public/Granted day:2021-01-21
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