Invention Grant
- Patent Title: Inter-period control for passive power distribution of multiple electrode inductive plasma source
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Application No.: US17174375Application Date: 2021-02-12
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Publication No.: US11615943B2Publication Date: 2023-03-28
- Inventor: Gideon Van Zyl
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03H7/40

Abstract:
A generator produces output such as delivered power, voltage, current, forward power etc. that follows a prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling sections of the pattern based on measurements taken one or more repetition periods in the past. A variable impedance match network may control the impedance presented to a radio frequency generator while the generator produces the output that follows the prescribed pattern of output versus time where the pattern repeats with a repetition period by controlling variable impedance elements in the match during sections of the pattern based on measurements taken one or more repetition periods in the past.
Public/Granted literature
- US20210166917A1 INTER-PERIOD CONTROL FOR PASSIVE POWER DISTRIBUTION OF MULTIPLE ELECTRODE INDUCTIVE PLASMA SOURCE Public/Granted day:2021-06-03
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