Invention Grant
- Patent Title: Micro assembler with fine angle control
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Application No.: US17690485Application Date: 2022-03-09
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Publication No.: US11615976B2Publication Date: 2023-03-28
- Inventor: JengPing Lu , Eugene M. Chow , David K. Biegelsen
- Applicant: PALO ALTO RESEARCH CENTER INCORPORATED
- Applicant Address: US CA Palo Alto
- Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee Address: US CA Palo Alto
- Agency: Mueting Raasch Group
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/683

Abstract:
First and second chiplets are positioned along a surface to respectively cover first and second electrodes. The first electrode is activated to cause an attraction force between the first electrode and the first chiplet. The second electrode is deactivated allowing the second chiplet to rotate on the surface. While the first electrode is activated and the second electrode is deactivated, a rotation field is applied to cause the second chiplet to be oriented at a desired orientation angle, the first chiplet being prevented from rotating by the attraction force.
Public/Granted literature
- US20220199447A1 MICRO ASSEMBLER WITH FINE ANGLE CONTROL Public/Granted day:2022-06-23
Information query
IPC分类: