Invention Grant
- Patent Title: Integrated circuit device with back-side interconnection to deep source/drain semiconductor
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Application No.: US17127863Application Date: 2020-12-18
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Publication No.: US11616015B2Publication Date: 2023-03-28
- Inventor: Patrick Morrow , Mauro J. Kobrinsky , Mark T. Bohr , Tahir Ghani , Rishabh Mehandru
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L29/66 ; H01L29/78 ; H01L21/306 ; H01L21/8234 ; H01L27/02 ; H01L27/088 ; H01L29/08 ; H01L29/10 ; H01L29/40 ; H01L21/768 ; H01L29/417 ; H01L29/772 ; H01L23/522 ; G06F30/392 ; G06F30/394

Abstract:
Transistor cell architectures including both front-side and back-side structures. A transistor may include one or more semiconductor fins with a gate stack disposed along a sidewall of a channel portion of the fin. One or more source/drain regions of the fin are etched to form recesses with a depth below the channel region. The recesses may extend through the entire fin height. Source/drain semiconductor is then deposited within the recess, coupling the channel region to a deep source/drain. A back-side of the transistor is processed to reveal the deep source/drain semiconductor material. One or more back-side interconnect metallization levels may couple to the deep source/drain of the transistor.
Public/Granted literature
- US20210111115A1 INTEGRATED CIRCUIT DEVICE WITH BACK-SIDE INERCONNECTION TO DEEP SOURCE/DRAIN SEMICONDUCTOR Public/Granted day:2021-04-15
Information query
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