Invention Grant
- Patent Title: Method for fabricating semiconductor device with porous insulating layers
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Application No.: US17520981Application Date: 2021-11-08
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Publication No.: US11616022B2Publication Date: 2023-03-28
- Inventor: Tse-Yao Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agent Xuan Zhang
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/02 ; H01L21/768 ; H01L23/532 ; H01L23/522

Abstract:
The present application discloses a method for fabricating a semiconductor device. The method includes providing a substrate; forming an insulating layer above the substrate; forming a first opening in the insulating layer; conformally forming a first framework layer in the first opening; forming an energy-removable layer on the first framework layer and filling the first opening; forming a second opening along the energy-removable layer and the first framework layer; conformally forming a second framework layer in the second opening; forming a top contact on the second framework layer and filling the second opening and forming a top conductive layer on the top contact; and performing an energy treatment to transform the energy-removable layer into porous insulating layers on two sides of the top contact.
Public/Granted literature
- US20220059463A1 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH POROUS INSULATING LAYERS Public/Granted day:2022-02-24
Information query
IPC分类: