Chip packaging method and particle chips
Abstract:
A method for packaging chips includes: providing a filter wafer and a plurality of substrates to be packaged, each substrate to be packaged being provided with one or more first pads; flip-chip bonding the substrates to be packaged on the filter wafer; molding the substrates to be packaged to form a molded layer on the substrates to be packaged, the substrates to be packaged, the molded layer, and the filter wafer forming a molded structure, each substrate to be packaged, a portion of the molded layer formed on the substrate to be packaged, and the filter wafer together enclosing a cavity; exposing the first pads out of the molded layer; and cutting the molded structure into a plurality of particle chips.
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