Invention Grant
- Patent Title: Symmetric arrangement of field plates in semiconductor devices
-
Application No.: US17650854Application Date: 2022-02-13
-
Publication No.: US11616127B2Publication Date: 2023-03-28
- Inventor: Johnatan Avraham Kantarovsky , Rajendran Krishnasamy , Siva P. Adusumilli , Steven Bentley , Michael Joseph Zierak , Jeonghyun Hwang
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US NY Malta
- Assignee: GlobalFoundries U.S. Inc.
- Current Assignee: GlobalFoundries U.S. Inc.
- Current Assignee Address: US NY Malta
- Agent David Cain
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/778 ; H01L29/66 ; H01L29/423 ; H01L29/78 ; H01L29/417

Abstract:
The present disclosure relates generally to structures in semiconductor devices and methods of forming the same. More particularly, the present disclosure relates to semiconductor devices having field plates that are arranged symmetrically around a gate. The present disclosure provides a semiconductor device including an active region above a substrate, source and drain electrodes in contact with the active region, a gate above the active region and laterally between the source and drain electrodes, a first field plate between the source electrode and the gate, a second field plate between the drain electrode and the gate, in which the gate is spaced apart laterally and substantially equidistant from the first field plate and the second field plate.
Public/Granted literature
- US20220165853A1 SYMMETRIC ARRANGEMENT OF FIELD PLATES IN SEMICONDUCTOR DEVICES Public/Granted day:2022-05-26
Information query
IPC分类: