Invention Grant
- Patent Title: Elastic wave device
-
Application No.: US17097011Application Date: 2020-11-13
-
Publication No.: US11616191B2Publication Date: 2023-03-28
- Inventor: Yutaka Kishimoto , Tetsuya Kimura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JP2016-117181 20160613
- Main IPC: H01L41/107
- IPC: H01L41/107 ; H01L41/047 ; H03H9/02 ; H03H9/17 ; H03H9/56

Abstract:
An elastic wave device in which a recess is provided on an upper side of a support, a piezoelectric thin film covers the recess, and an IDT electrode is provided on an upper surface of the piezoelectric thin film. A plate wave of an S0 mode or SH0 mode is used. A plurality of grooves are provided in the upper surface or lower surface of the piezoelectric thin film at a portion of the piezoelectric thin film that is positioned on a hollow section.
Public/Granted literature
- US20210066575A1 ELASTIC WAVE DEVICE Public/Granted day:2021-03-04
Information query
IPC分类: