Invention Grant
- Patent Title: Vertical-cavity surface-emitting laser with a tunnel junction
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Application No.: US16948763Application Date: 2020-09-30
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Publication No.: US11616343B2Publication Date: 2023-03-28
- Inventor: Jun Yang , Guowei Zhao , Matthew Glenn Peters , Eric R. Hegblom , Ajit Vijay Barve , Benjamin Kesler
- Applicant: Lumentum Operations LLC
- Applicant Address: US CA San Jose
- Assignee: Lumentum Operations LLC
- Current Assignee: Lumentum Operations LLC
- Current Assignee Address: US CA San Jose
- Agency: Harrity & Harrity, LLP
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/30 ; H01S5/183 ; H01S5/34 ; H01S5/042

Abstract:
A VCSEL may include an n-type substrate layer and an n-type bottom mirror on a surface of the n-type substrate layer. The VCSEL may include an active region on the n-type bottom mirror and a p-type layer on the active region. The VCSEL may include an oxidation layer over the active region to provide optical and electrical confinement of the VCSEL. The VCSEL may include a tunnel junction over the p-type layer to reverse a carrier type of an n-type top mirror. Either the oxidation layer is on or in the p-type layer and the tunnel junction is on the oxidation layer, or the tunnel junction is on the p-type layer and the oxidation layer is on the tunnel junction. The VCSEL may include the n-type top mirror over the tunnel junction, a top contact layer over the n-type top mirror, and a top metal on the top contact layer.
Public/Granted literature
- US20210367407A1 VERTICAL-CAVITY SURFACE-EMITTING LASER WITH A TUNNEL JUNCTION Public/Granted day:2021-11-25
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