Invention Grant
- Patent Title: Acoustic wave devices on stacked die
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Application No.: US16381576Application Date: 2019-04-11
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Publication No.: US11616487B2Publication Date: 2023-03-28
- Inventor: Hiroyuki Nakamura , Rei Goto , Keiichi Maki
- Applicant: Skyworks Solutions, Inc.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/54 ; H03F3/24 ; H03H9/05 ; H03H9/145 ; H03H9/25 ; H03H9/64 ; H04B1/00 ; H03H9/46

Abstract:
Aspects of this disclosure relate to acoustic wave devices on stacked die. A first die can include first acoustic wave device configured to generate a boundary acoustic wave. A second die can include a second acoustic wave device configured to generate a second boundary acoustic wave, in which the second die is stacked with the first die. The first acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode on the piezoelectric layer, and high acoustic velocity layers on opposing sides of the piezoelectric layer. The high acoustic velocity layers can each have an acoustic velocity that is greater than a velocity of the boundary acoustic wave.
Public/Granted literature
- US20190326875A1 ACOUSTIC WAVE DEVICES ON STACKED DIE Public/Granted day:2019-10-24
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