Invention Grant
- Patent Title: Sensor with chamber
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Application No.: US17225844Application Date: 2021-04-08
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Publication No.: US11618670B2Publication Date: 2023-04-04
- Inventor: Yu-Fen Tzeng , Chia-Pin Huang , Yu-Hsuan Liao , Chun-Hsien Tsai , Ting-Chuan Lee , Chun-Jung Tsai
- Applicant: AI Nose Corporation
- Applicant Address: TW New Taipei
- Assignee: AI Nose Corporation
- Current Assignee: AI Nose Corporation
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW109112039 20200409
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G01D11/24

Abstract:
A sensor with a chamber comprises a base, a cavity body, a sensing element, and a porous gel material. The cavity body is disposed on the base and has a cavity wall and an inner space formed inside the cavity wall, the sensing element is disposed on the cavity wall, and the porous gel material is disposed between the base and the cavity body, the porous gel material has a porosity of not less than 80%, so that gas is capable of communicating between the inner space of the cavity body and an outside, thereby forming a passage for gas to enter and exit to balance a pressure in the sensor with the chamber, increase a support of the sensor with the chamber, and reduce the risk of conventional bonding between the sensing element and the base using die-bonding adhesive.
Public/Granted literature
- US20210316985A1 SENSOR WITH CHAMBER Public/Granted day:2021-10-14
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