Invention Grant
- Patent Title: Method of manufacturing display apparatus
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Application No.: US16531866Application Date: 2019-08-05
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Publication No.: US11618940B2Publication Date: 2023-04-04
- Inventor: Kyubum Kim , Sungjin Kim , Chunyoung Park , Uno Chang
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2018-0134444 20181105
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/56 ; G03F7/20 ; H01L21/687 ; H01L21/677 ; B05B12/22
Abstract:
A method of manufacturing a display apparatus includes: sequentially fixing a display substrate and a mask assembly to a carrier; transporting the mask assembly and the display substrate to a deposition unit via the carrier; and depositing a deposition material on the display substrate by passing the deposition material through the mask assembly, by using the deposition unit.
Public/Granted literature
- US11597994B2 Method of manufacturing display apparatus Public/Granted day:2023-03-07
Information query
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