Invention Grant
- Patent Title: Methods of producing optically-finished thin diamond substrates or windows of high aspect ratio
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Application No.: US16663423Application Date: 2019-10-25
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Publication No.: US11618945B2Publication Date: 2023-04-04
- Inventor: Wen-Qing Xu , Thomas E. Anderson , Giovanni Barbarossa , Elgin E. Eissler , Chao Liu , Charles D. Tanner
- Applicant: II-VI Delaware, Inc.
- Applicant Address: US DE Wilmington
- Assignee: II-VI Delaware, Inc.
- Current Assignee: II-VI Delaware, Inc.
- Current Assignee Address: US DE Wilmington
- Agency: Blank Rome LLP
- Main IPC: C23C16/27
- IPC: C23C16/27 ; C23C16/01 ; C23C16/56 ; C23C16/511
Abstract:
In a method of forming a diamond film, substrate, or window, a substrate is provided and the diamond film, substrate, or window is CVD grown on a surface of the substrate. The grown diamond film, substrate, or window has a thickness between 150-999 microns and an aspect ratio≥100, wherein the aspect ratio is a ratio of a largest dimension of the diamond film, substrate or window divided by a thickness of the diamond film. The substrate can optionally be removed or separated from the grown diamond film, substrate, or window.
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