Invention Grant
- Patent Title: Cryopump and cryocooler vibration isolation structure
-
Application No.: US17491914Application Date: 2021-10-01
-
Publication No.: US11619215B2Publication Date: 2023-04-04
- Inventor: Takahiro Nakanishi
- Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JPJP2019-070799 20190402
- Main IPC: F04B37/08
- IPC: F04B37/08 ; F16F15/04 ; F04B53/00

Abstract:
Provided is a cryopump including a cryopump vacuum chamber, a cryocooler, a first flange fixed to the cryopump vacuum chamber, a second flange fixed to the cryocooler and airtightly connected to the first flange, and an annular laminated vibration isolation body in which a first annular vibration isolation material, a first annular support member, an intermediate annular vibration isolation material, a second annular support member, and a second annular vibration isolation material are disposed in this order from the first flange toward the second flange. The second annular support member and the first annular support member are fixed to the first flange and the second flange, respectively, such that the first flange and the second annular support member are vibration-isolated from the second flange and the first annular support member.
Public/Granted literature
- US20220018342A1 CRYOPUMP AND CRYOCOOLER VIBRATION ISOLATION STRUCTURE Public/Granted day:2022-01-20
Information query