Invention Grant
- Patent Title: Microscope apparatus
-
Application No.: US16952351Application Date: 2020-11-19
-
Publication No.: US11619806B2Publication Date: 2023-04-04
- Inventor: Fu-Sheng Chu , Chih-Shiang Chou , Yu-Po Tang , Yan-Ying He
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G02B21/14
- IPC: G02B21/14 ; G02B21/36 ; G02B26/06

Abstract:
A microscope apparatus includes light source configured to generate an illuminating beam. The microscope apparatus further includes a first beam splitter configured to split the illuminating beam into a first component along a first path and a second component along a second path. The microscope apparatus further includes a movable reflector module along the second path. The microscope apparatus further includes a moving mechanism connected to the movable reflector module, wherein the moving mechanism is configured to move the movable reflector in a first direction for adjusting a length of the second path. The microscope apparatus further includes a second beam splitter configured to recombine the first component and the second component. The microscope apparatus further includes an observing device configured to receive the recombined first component and second component.
Public/Granted literature
- US20210072527A1 MICROSCOPE APPARATUS Public/Granted day:2021-03-11
Information query