- Patent Title: Optical modulator using monocrystalline and polycrystalline silicon
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Application No.: US17302632Application Date: 2021-05-07
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Publication No.: US11619838B2Publication Date: 2023-04-04
- Inventor: Xunyuan Zhang , Vipulkumar K. Patel , Prakash B. Gothoskar , Ming Gai Stanley Lo
- Applicant: Cisco Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Cisco Technology, Inc.
- Current Assignee: Cisco Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Patterson + Sheridan, LLP
- Main IPC: G02F1/025
- IPC: G02F1/025

Abstract:
Embodiments provide for an optical modulator, comprising: a lower guide, comprising: a lower hub, made of monocrystalline silicon; and a lower ridge, made of monocrystalline silicon that extends in a first direction from the lower hub; an upper guide, including: an upper hub; and an upper ridge, made of monocrystalline silicon that extends in a second direction, opposite of the first direction, from the upper hub and is aligned with the lower ridge; and a gate oxide layer separating the lower ridge from the upper ridge and defining a waveguide region with the lower guide and the upper guide.
Public/Granted literature
- US20210263351A1 OPTICAL MODULATOR USING MONOCRYSTALLINE AND POLYCRYSTALLINE SILICON Public/Granted day:2021-08-26
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